PIVOTAL SYSTEMS EXHIBITING AT SEMICON EUROPA 2024
Pivotal Systems will be showcasing their innovative gas flow controller solutions at Semicon Europa 2024 in Munich, Germany from November
Pivotal Systems provides best-in-class monitoring and control technology platform for the global semiconductor industry.
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As process geometries within the semiconductor industry continue to shrink to 10 nm and beyond, the need for highly accurate, responsive and repeatable gas flow control during wafer processing is essential. With the emergence of low gas flow rates, short processing times and continuous plasma processing, best-in-class MFCs are struggling to meet the accuracy, settling time and repeatability requirements demanded to ensure high yield and matched chambers. Pivotal Systems’ GFC paves the way for the future of gas flow control. The GFC combines Pivotal’s patented, high accuracy GFM™ system with patented control valve technology. As such, it leapfrogs the current MFC technology by offering an order of magnitude improvement on key flow metrics, thereby enabling advanced wafer-manufacturing processes.
The Flow Ratio Controller is Pivotal Systems’ newest product series. Using Pivotal Systems’ proprietary positional valve, the FRC maintains the high accuracy and speed that Pivotal flow control products are known for.
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Pivotal Systems’ pressure controllers are designed to meet the industry’s needs for high-speed and high accuracy pressure control
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The Pivotal Systems’ Mass Flow Meter (MFM) will take advantage of the robust design of the GFC-X, achieving an economical and highly accurate in-line measurement system for gas flow.
Coming Soon!
Pivotal Systems’ High-Speed Valve technology is based on our proprietary control valve.
Pivotal Systems will be showcasing their innovative gas flow controller solutions at Semicon Europa 2024 in Munich, Germany from November
Introducing the GFC X and Flow Ratio Controller, setting new benchmarks in semiconductor manufacturing efficiency and precision. Fremont, California —
Dear Pivotal Systems Partners, It is with great pleasure and excitement that we announce the appointment of our new Chief
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