Economical solution
Services broader applications and markets
Multi-gas configurable with 350+ gases supported
Pressure Insensitive
Thermal Gas Flow Controller

GFC-T

An economical thermal solution, servicing broader applications in both the semiconductor market and other industries. Pivotal Systems’ GFC-T offers a thermal MFC solution for a wide flow range from 2 SCCM to 200 SLM. At Pivotal Systems, we aim to significantly enhance fab productivity and capital efficiency by utilizing our innovative solutions.

Features

  • Pressure insensitive
  • Multi-gas configurable
  • No fixed orifice
  • Over 350 gases supported
  • Semi F19 and F20 Compliant

Benefits

  • Wide flow range 2 SCCM – 200 SLM
  • Supports all standard communication protocols- Analog, RS-485, DeviceNet, EtherCAT, Profibus, and Profinet
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The Future of Flow Control is Now.