Pivotal Systems provides the best-in-class gas flow monitoring and control technology platform for the global semiconductor industry. The company’s proprietary hardware and software utilizes advanced machine learning to enable preventative diagnostic capability resulting in an order of magnitude increase in fab productivity and capital efficiency for existing and future technology nodes.

The platform includes Pivotal’s Gas Flow Controller (GFC) product lines that offer high-accuracy, real-time monitoring and control of the most critical parameters difficult to control in wafer processing today: Gas Flow and Chamber Condition.

  • Pivotal’s Ultra-High Speed GFCs operate at speeds down to ≤ 10msec on/off for process set point response time. This represents a significant speed improvement over other suppliers in the industry. At the same time, Pivotal can guarantee flow accuracy of ±0.5% of set point for the actual gas at these speeds. This leads to improved chamber matching and potential process improvements.
  • Pivotal’s new High Flow GFCs flows up to 50 slm. Leading manufacturers are already qualifying the High Flow GFCs into their fabs for the most advanced CVD and ALD processes.

IDMs, foundries and OEMs use Pivotal’s products to dramatically improve yield and productivity by avoiding catastrophic scrap events, tightening process windows and matching chambers more effectively.

To meet strong industry demand, Pivotal Systems now operates high-capacity manufacturing facilities in the United States and Korea, and the company has annually doubled its total unit production each year since 2014.

As process geometries within the semiconductor industry continue to shrink to 10 nm and beyond, the need for highly accurate, responsive and repeatable gas flow control during wafer processing is essential. With the emergence of low gas flow rates, short processing times and continuous plasma processing, best-in-class MFCs are struggling to meet the accuracy, settling time and repeatability requirements demanded to ensure high yield and matched chambers.

Pivotal Systems’ GFC paves the way for the future of gas flow control. The GFC combines Pivotal’s patented, high accuracy GFM™ system with patented control valve technology. As such, it leapfrogs the current MFC technology by offering an order of magnitude improvement on key flow metrics, thereby enabling advanced wafer-manufacturing processes.

 GFC20™ | GFC200™ | GFC1000™ | GFC2000™

Widest Flow Range with Accuracy (Actual Gas)0.5-100% Full Scale
Best Flow Accuracy±0.5% of Setpoint for 0.5-100% Full Scale
Fastest Settling Time for Turn-On and Turndown5%-100% FS <50 ms
0.5%-5% FS <100 ms
Effect of Pressure and TemperatureInvariant
Automated In Situ CalibrationNIST Traceable
Innovative Control TechnologyRobust Design, No Orifice

GFC5L™ | GFC20L™ | GFC50L™

Widest Flow Range2.0-100% Full Scale
Flow Accuracy±1.0% of Setpoint 0.5slm – 5 slm,
2.0slm – 20 slm, 5.0 slm – 50 slm
±0.25% of full scale for 2.0-10.0% Full Scale
Fastest Settling Time for Turn-On and Turndown≤300ms 10%-100% F.S.
Innovative Control TechnologyRobust Design, No Orifice

Pivotal Systems
48389 Fremont Blvd. Suite 100
Fremont, CA, 94538
Phone: +1 (510) 770-9125

Shibaura Eletec Corp.

2-5-1, Kasama, Sakae-ku
Yokohama, Kanagawa Pref., 247-0006

Misaki Yajima
Phone: 81-045-896-0815

HS Inc.

HS B/D 26, Gomae-ro 34beon-gil
Giheung gu, Yongin-si
Gyeonggi-do, 17086

Yeon Hae Jeong
Email: yhjeong@hi-sol.com
Phone: 82-31-721-8771

GBST Taiwan Co., Ltd.

No.207, Gaocui Rd., East District,
Hsinchu City 300,
Taiwan (R.O.C)

Kay Hsiung
Email: kay@gbst.com.tw or gbstoffice@gbst.com.tw
Phone: 88 6926093269

Thermoelectric Technology Co., Ltd.

2F., No.5, East 2 Section, GuangMing 6th Road
Zhubei City, Hsinchu County,
Taiwan R.O.C

Jack Hsiao
Phone: 88 635509988

Zhan Yan International Co. Ltd.

Rm 410, No. 8, Zhengyi Road, Yangpu District
Shanghai 200433 P.R.C

George Guo
Email: george.guo@newtalk.com
Phone: 86 2165361148

TELTEC Pte. Ltd.

38 Ang Mo Kio Industrial Park 2, #02-07A
Singapore 569511

Lawrence Ng
Email: lawrence.ng@teltec.sg
Phone: 65 6352 0238 ext 107

TELTEC Semiconductor Technic GmbH

Am Moosbach 6
74535 Mainhardt

Alexander Werner
Phone: 49 7903 9144-40