Pivotal Systems provides the best-in-class gas flow monitoring and control technology platform for the global semiconductor industry. The company’s proprietary hardware and software utilizes advanced machine learning to enable preventative diagnostic capability resulting in an order of magnitude increase in fab productivity and capital efficiency for existing and future technology nodes.

The platform includes Pivotal’s Gas Flow Controller (GFC) product lines that offer high-accuracy, real-time monitoring and control of the most critical parameters difficult to control in wafer processing today: Gas Flow and Chamber Condition.

  • Pivotal’s Ultra-High Speed GFCs operate at speeds down to ≤ 10msec on/off for process set point response time. This represents a significant speed improvement over other suppliers in the industry. At the same time, Pivotal can guarantee flow accuracy of ±0.5% of set point for the actual gas at these speeds. This leads to improved chamber matching and potential process improvements.
  • Pivotal’s new High Flow GFCs flows up to 50 slm. Leading manufacturers are already qualifying the High Flow GFCs into their fabs for the most advanced CVD and ALD processes.

IDMs, foundries and OEMs use Pivotal’s products to dramatically improve yield and productivity by avoiding catastrophic scrap events, tightening process windows and matching chambers more effectively.

To meet strong industry demand, Pivotal Systems now operates high-capacity manufacturing facilities in the United States and Korea, and the company has annually doubled its total unit production each year since 2014.

As process geometries within the semiconductor industry continue to shrink to 10 nm and beyond, the need for highly accurate, responsive and repeatable gas flow control during wafer processing is essential. With the emergence of low gas flow rates, short processing times and continuous plasma processing, best-in-class MFCs are struggling to meet the accuracy, settling time and repeatability requirements demanded to ensure high yield and matched chambers.

Pivotal Systems’ GFC paves the way for the future of gas flow control. The GFC combines Pivotal’s patented, high accuracy GFM™ system with patented control valve technology. As such, it leapfrogs the current MFC technology by offering an order of magnitude improvement on key flow metrics, thereby enabling advanced wafer-manufacturing processes.

 GFC20™ | GFC200™ | GFC1000™ | GFC2000™

Widest Flow Range with Accuracy (Actual Gas)0.5-100% Full Scale
Best Flow Accuracy±0.5% of Setpoint for 0.5-100% Full Scale
Fastest Settling Time for Turn-On and Turndown5%-100% FS <50 ms
0.5%-5% FS <100 ms
Effect of Pressure and TemperatureInvariant
Automated In Situ CalibrationNIST Traceable
Innovative Control TechnologyRobust Design, No Orifice

GFC5L™ | GFC20L™ | GFC50L™

Widest Flow Range2.0-100% Full Scale
Flow Accuracy±1.0% of Setpoint 0.5slm – 5 slm,
2.0slm – 20 slm, 5.0 slm – 50 slm
±0.25% of full scale for 2.0-10.0% Full Scale
Fastest Settling Time for Turn-On and Turndown≤300ms 10%-100% F.S.
Innovative Control TechnologyRobust Design, No Orifice

Pivotal Systems
48389 Fremont Blvd. Suite 100
Fremont, CA, 94538
Phone: +1 (510) 770-9125

Media Relations

Notice to U.S. persons: restriction on purchasing CDIs

Pivotal Systems is incorporated in the State of Delaware and its securities have not been registered under the U.S. Securities Act of 1933 or the laws of any state or other jurisdiction in the United States. Trading of Pivotal Systems’ CHESS Depositary Interests (“CDIs”) on the Australian Securities Exchange is not subject to the registration requirements of the U.S. Securities Act in reliance on Regulation S under the U.S. Securities Act and a related ‘no action’ letter issued by the U.S. Securities and Exchange Commission to the ASX in 2000. As a result, the CDIs are “restricted securities” (as defined in Rule 144 under the U.S. Securities Act) and may not be sold or otherwise transferred except in transactions exempt from, or not subject to, the registration requirements of the U.S. Securities Act. For instance, U.S. persons who are qualified institutional buyers (“QIBs”, as defined in Rule 144A under the U.S. Securities Act) may purchase CDIs in reliance on the exemption from registration provided by Rule 144A. To enforce the transfer restrictions, the CDIs bear a FOR Financial Product designation on the ASX. This designation restricts CDIs from being purchased by U.S. persons except those who are QIBs. In addition, hedging transactions with regard to the CDIs may only be conducted in compliance with the U.S. Securities Act.