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Systems

FLOW RATIO CONTROLLER (FRC)

FRC

Pivotal is now introducing a flow ratio controller that uses Pivotal’s proprietary control valve to improve wafer uniformity and wafer to wafer uniformity. It’s the industry’s fastest Flow Ratio Controller, meeting a <1 sec. settling time requirement.

Available in 3 and 4 channel configurations and both ECAT and DNET communication.

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