Gas Flow Controller

GFC “Stubby”

Pivotal Systems’ GFC-S series paves the way for the future of gas flow control.  Pivotal Systems’ GFC “Stubby” builds on our flagship GFC-S model, yet offered in another form factor to meet our customer needs. The GFC “Stubby” combines Pivotal’s patented, high accuracy GFM system with patented control valve technology. As such, it leapfrogs the current MFC technology by offering an order of magnitude improvement on key flow metrics, thereby enabling advanced wafer-manufacturing processes. At Pivotal Systems, we aim to significantly enhance fab productivity and capital efficiency by utilizing our innovative solutions.

 

Features

  • Flow accuracy +/- 0.5% of Setpoint
  • Response time <50ms
  • Machine Learning used to update valve positioning
  • Open flow path with no small orifices or capillary tubes

Benefits

  • No zero drift
  • Calibration and maintenance free
  • Exceptional corrosive gas performance
  • Unparalleled diagnostics available

Request More Info
Please enable JavaScript in your browser to complete this form.
Name
Checkboxes

The Future of Flow Control is Now.