Economical solution
Services broader applications and markets
Multi-gas configurable with 350+ gases supported
Pressure Insensitive Option Available
Thermal Gas Flow Controller

GFC-T

Pivotal Systems’ GFC-T  offers an economical thermal solution to service broader applications and markets. Pivotal Systems’ GFC-T offers a thermal MFC solutions for a wide flow range up to 500 SLM. At Pivotal Systems, we aim to significantly enhance fab productivity and capital efficiency by utilizing our innovative solutions.

Features

  • Pressure insensitive option available
  • Multi-gas configurable
  • Over 350 gases supported
  • Semi F19 and F20 Compliant

Benefits

  • Economical option for semi and non-semi applications
  • Supports all standard communication protocols- Analog, RS-485, DeviceNet, EtherCAT, Profibus, and Profinet

Specifications

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The Future of Flow Control is Now.