Economical solution
Services broader applications and markets
Wide flow range 2 SCCM - 500 SLM
Multi-gas configurable with 350+ gases supported
Thermal Gas Flow Controller

GFC-TN

An economical thermal solution, servicing broader applications and markets. Pivotal Systems’
GFC-TN offers a thermal MFC solution for a wide flow range from 2 SCCM to 500 SLM. At Pivotal
Systems, we aim to significantly enhance fab productivity and capital efficiency by utilizing
our innovative solutions.

Features

  • No fixed orifice
  • Multi-gas configurable with 350+ gases supported

Benefits

  • Economical option for industry applications
  • Wide flow range 2 SCCM – 500 SLM
  • Supports all standard communication protocols- Analog, RS-485, DeviceNet, EtherCAT, Profibus, and Profinet
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