Achieve higher productivity and process control
Accurately responds to changing ratios and flows in under a second
Flow Ratio Controller

FRC

Pivotal is now introducing a flow ratio controller that uses Pivotal’s proprietary control valve to improve wafer uniformity and wafer to wafer uniformity.

It’s the industry’s fastest flow ratio controller, with a settling time under one second.

Features

  • 3 and 4 channel options available
  • Settling time <1 second

Benefits

  • Exceptional corrosive gas performance
  • High speed control and accuracy

Specifications


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The Future of Flow Control is Now.