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Pivotal Systems Showcasing Industry’s Fastest Gas Flow Controller at Semicon Korea 2024

At SEMICON KOREA 2024 from January 31 to February 2, Pivotal Systems Corporation (“Pivotal” or the “Company”) is exhibiting the industry’s fastest flow controller, the Pivotal High Speed Gas Flow Controller (HSGFC), which is based on the field proven GFC architecture, and enables the industry’s fastest response time of <50msec, twice as fast as the competitor’s latest mass flow controller available nowadays.

“With the 50msec capability, Pivotal once again takes advantage of its flexible, high-performance GFC platform, improving both the turn-on and turn-off response times to an industry-leading 50msec with only a firmware change,” said Joseph Monkowski, President and CTO for Pivotal Systems.  “For over 10 years, Pivotal has been the technology leader, providing products with the speed, accuracy, and reliability that our customers need to meet their technology roadmaps.”

Being used by the leading IDMs, foundries and OEMs present day in wafer processing, Pivotal’s full product line of Gas Flow Controllers (GFC) offers not only the highest accuracy but also real-time monitoring and control of the most critical gas flow parameters, to obviously enhance yield and productivity by avoiding catastrophic scrap events, tightening process windows, matching chambers and eliminating the need for the calibration of offline flow.