Pivotal Systems introduces its new Flow Controller, GFC-H-5L, GFC-H-20L and GFC-H -50L , for precise flow control up to maximum of 50 liters at an accuracy of ±1.0% of set point and a turn-on/turn-off time of of ≤200msec for 10% to 100% of the full scale flow. This new product compliments the existing GFC product family of GFC-20, GFC-200, GFC-1000 and GFC-2000 which will encompass all of the semiconductor processes.

Joseph Monkowski, CTO and President for Pivotal Systems, said, “Multiple repeat orders for the GFC-H placed by leading device manufacturer’s and equipment companies show the quick acceptance of our latest technology. We are quite pleased to once again bring solutions to the industry leaders.” Nori Kobayakawa, VP of Global Marketing for Pivotal Systems, added, “Flow from 2L to 50L require a new level of technical capability in both flow accuracy and control. We are pleased to provide that new level of performance to the industry. The introduction of the GFC-H enables Pivotal Systems to provide solutions across the entire semiconductor gas flow range.”

Pivotal Systems, the leading provider of best-in-class monitoring and process control technology for the semiconductor manufacturing industry, today introduced its new Ultra High-Speed Gas Flow Controller (UHS GFC) at SEMICON WEST 2017. The UHS GFC operates at speeds down to 10msec response time, compared to the current industry leading 100msec guarantee available today on the standard Pivotal Systems’ GFC.

“The UHS GFC will improve the accuracy, repeatability, and ramping capability for leading plasma etch, atomic layer deposition and epitaxy (ALD/ALE) processes,” said Joseph Monkowski, CTO and President for Pivotal Systems. “We are seeing flow controllers being moved much closer to process chambers to maximize this new capability. We also believe that our industry leading control systems enable much better process controls for both device manufacturers and equipment companies.”

Pivotal’s current product line of Gas Flow Controllers (GFC) offers both the highest accuracy and real-time monitoring and control of the most critical gas flow parameters in wafer processing today. Leading IDMs, foundries and OEMs use Pivotal’s products to dramatically increase yield and productivity by avoiding catastrophic scrap events, tightening process windows, and matching chambers and eliminating off line flow calibration.

“We see the UHS GFC as yet another game changer because there are no other technologies in the market today that can flow accurately at these speeds,” said Nori Kobayakawa, VP of Global Marketing for Pivotal Systems. Speed and nanometer control of our flow controllers enable industry leading precision.

The UHS GFC has already begun shipping to leading customers and Pivotal has received multiple repeat orders.

Pivotal Systems working with Accolade Engineering Solutions, Irvine, CA has demonstrated through multiple highly accelerated lifetime (HALT) tests where temperature cycling between – 60° C to 110° C were run to check the reliability of the GFC. Kelly McDonough, VP of Engineering said, “The GFC has been designed for very reliable performance and has demonstrated it by running with corrosive gases like Cl2 running in production lines for over 34 months but, never did I think we would be running with no issues at the temperature ranges we tested.”

Pivotal Systems is pleased to announce that the company’s quality management system has been certified to the ISO 9001:2008 standard, an industry benchmark that ensures consistent, high-quality products and services are being provided to customers. The ISO 9001:2008 standard is based on recognized principles of superior quality control, strong customer focus, motivation of top leaders, and commitment to continual improvement. Pivotal system’s certification was awarded after independent inspection and verification by DNV-GL, the industry’s leading certification body. A variety of internal audits were performed to test the company’s quality management system and processes. By meeting all the applicable requirements, Pivotal received the certificate with zero non-conformances. The certification process has a number of benefits. As Pivotal Systems improved its processes, it was also able to increase its efficiency. Because of the Semiconductor industry’s focus on Quality, Pivotal Systems believes that this certification will give its customers confidence in the quality of its products. “When our customers are looking for industry leading gas flow performance, we want them to be assured that Pivotal Systems is able to provide those products at the highest quality level,” said CEO John Hoffman. “Our customers are the focus of everything we do,” said VP of Quality Joseph Hajost. “We pride ourselves on meeting or exceeding all industry standards for safety, service and quality.” The ISO 9001:2008 standard was developed by the International Organization for Standardization (ISO), an independent, non-governmental membership organization and the world’s largest developer of voluntary International Standards. Over one million companies and organizations in over 170 countries have implemented the ISO 9001:2008 standard.