Products > Technical Publications
A New Device for Highly Accurate Gas Flow Control With Extremely Fast Response Times
(IBM, Pivotal Systems)
May 18, 2011
Presentation material from the 2011 Advanced Semiconductor Manufacturing Conference (ASMC)
(IBM, Pivotal Systems)
May 18, 2011
Presentation material from the 2011 Advanced Semiconductor Manufacturing Conference (ASMC)
A New Device for Highly Accurate Gas Flow Control With Extremely Fast Response Times
(IBM, Pivotal Systems)
May 18, 2011
White paper published at the 2011 Advanced Semiconductor Manufacturing Conference (ASMC)
(IBM, Pivotal Systems)
May 18, 2011
White paper published at the 2011 Advanced Semiconductor Manufacturing Conference (ASMC)
Real-Time Gas Flow Monitoring Improves Mass Flow Controller Performance Understanding in Wafer Fab
(Samsung, Pivotal Systems)
February 1, 2011
Technical article featured in Solid State Technology
(Samsung, Pivotal Systems)
February 1, 2011
Technical article featured in Solid State Technology
Improving Etch Performance Using In Situ Gas Flow Monitoring and Control
(IBM, Pivotal Systems)
August 12, 2010
Technical presentation proceedings from the Plasma Application Group, part of the Northern California Chapter
of the American Vacuum Society
(IBM, Pivotal Systems)
August 12, 2010
Technical presentation proceedings from the Plasma Application Group, part of the Northern California Chapter
of the American Vacuum Society
Improving Etch Performance Using In Situ Gas Flow Monitoring and Control
(IBM, Pivotal Systems)
July 11, 2010
Technical article featured in Solid State Technology
(IBM, Pivotal Systems)
July 11, 2010
Technical article featured in Solid State Technology
Sensor X: In Situ Metrology for Plasma Processing
(Pivotal Systems)
August 21, 2009
Technical presentation proceedings from the Plasma Application Group, part of the Northern California
Chapter of the American Vacuum Society
(Pivotal Systems)
August 21, 2009
Technical presentation proceedings from the Plasma Application Group, part of the Northern California
Chapter of the American Vacuum Society
Increasing Productivity of Metal ALD Through Introduction of Cleaning and Sensing Technology
(Aviza Technology, Pivotal Systems)
January 11, 2009
Technical article featured in Solid State Technology
(Aviza Technology, Pivotal Systems)
January 11, 2009
Technical article featured in Solid State Technology
Process Control of Chrome Dry Etching by Complete Characterization of the RF Power Delivery (Advanced Mask Technology Center, Pivotal Systems)
October 17, 2008
Proceedings paper from SPIE Photomask Technology 2008 conference
October 17, 2008
Proceedings paper from SPIE Photomask Technology 2008 conference
A New Method for Very Low Open Area End Point Detection (Qimonda, Pivotal Systems)
April 18, 2007
Proceedings presentation from European AEC/APC 2007 conference
April 18, 2007
Proceedings presentation from European AEC/APC 2007 conference