![]() |
|
|||||||||||||||
![]() |
|
Matching chambers has never been more difficult and costly in today's semiconductor manufacturing environments. UNTIL NOW... Pivotal takes the art out of chamber matching through its suite of Process MatchTM in situ sensors and turnkey control / fault detection applications, ensuring predictable process results wafer to wafer and chamber to chamber as well as delivering significant gains in yield and toolset productivity. |
||
| Pivotal Systems, 4637 Chabot Drive, Pleasanton, CA 94588 info@pivotalsys.com |
| © 2008 Pivotal Systems | Technology and Capabilities | Products and Solutions | Company | Contact Us | Services |